Karl Suss MA-200

Mask Aligner with CIC1000 lamp housing
Version: 200 mm

The machine was in working condition up until it
was removed from service in 2019.
The hardware is in the Intel Standard Configuration
Suss MA200 Mask Aligner
UV400/cont/W-200 optics
365/405 dual range sensor
MA200 Wafer Chuck (200mm)
Mask Holder with Guard
DVM8 with Sony cameras-machine level
L25X Objective (quantity 2)
Field Expanders
SUSS AL3000 Auto Align system w/ ROSIE

Dimensions
o Main Unit: 188H x 163W x 98D mm (6H x 5.4W x 3.2D ft)
o Remote Console: 183 x 66 x 82 mm (6H x 2.2W x 2.7D ft)