Karl Suss MA45

Description:
-Mask Aligner Karl Suss MA 45 (refurbished by expert), TSA, up to 4” Wafer or SubstrateMA45 Mask Aligner – inclusive Service and Function tested.
Prepared for Hard- and Softcontact
Mask Aligner for manual Alignment
(Substrates up to max. 100 x 100 mm, 4” Wafer)
Manuel Loading of Masks und Substrates
Adjustment by Micrometerbolts
Adjustment by Splitfield Microscope
Light source for various Spectral Ranges UV 300-400
Diffraction Optics UV 400
Base machine specification:
Base Machine with mechanical, pneumatic and electric equipment
X,Y, Theta und Z Adjustment with WEC-Head
(WEC-Head and Micrometerbolts for Rough and Fine Adjustment)
Lamphouse LH 350W

Optics equipped with:
Ellipsoidal Reflector
Cold Light Mirror UV 400
Diffraction Optics UV400
Diversion Mirror 45° (LH 350)
Frontlens 100 mm x 100mm
Lamp HBO 350 W/S
Power Supply CIC500 incl. Ignition Box

Splitfield Microscope
1 Set Oculars, 1 Set Objectives (customer wish)
1 Set Fibre Optics for Microscope Illumination
1 x Exposure Chuck 100 x 100 mm (4”)
1 x Mask Holder M-5”, S-4”