Karl Suss MA 100/150e

SussMicrotec Mask Aligner MA 150e
Remanufactured Automatic Mask Aligner System,

Configuration:
Suss MA 100/150e Automatic / Windows 10 Based Machine
Cassette to Cassette handling system
Proximity Contact - Vacuum/Cont.
2 Cassette Station MA150 W2" to W6" (Wafer and Substrate
3 Alignment System TSA / fully - Automatic and manual alignment system
4 DVM Microscope incl. 5x / 10x / 20x Objective
5 Turret kit DVM6
6 LH350 and CIC1200 power supply
7 HG Lamp 350W
8 Exposure Optics UV 400 HP
9 Suss 2 Channel light sensor 365 / 400 NM
10 Transport Plates Kit W100 -W150
11 Exposure Chuck W150 Cont./Prox.
12 mask holders MA150 W6“ - M7“
13 Prealigner Station Non-Cont. W3" up to W6"
14 Exposure test dial 150mm
All work will be done to SUSS Standards and Specification,
Test Exposure and customer qualification can be done.

Vintage: 2010
Condition: very good