Hitachi VERT SCAN R5500GL-LED-A150

High-Tech Science Scanning White Interference Microscope

specification
○Observation interference microscope R5500 series
・Selectable wavelength: 530nm
・Objective lens: 5x (Michelson type), 10x, 20x, 50x (Mirow type)
・Eyepiece lens: CFI15x, number of fields of view 14.5
・Camera: 1/3 type CCD
・Light source: White LED
・Piezo measurement mode/measurement range: Phase/4μm,
Wave/+10 to -140μm, Focus/+10 to -140μm
*Wavelength changed to 520nm only in Phase mode
・Motor measurement mode/measurement range: WaveM/150μm, FocusM/3000μm (L), 650μm (H)
LayerM/3000μm
・Field of view size (CCD camera pixel count):
X (640,480,400,320,256,160,128)
Y (480,400,320,256,160,128)
・Stage: X, Y axis electric (controlled from controller and software)
・Tilt mechanism: Adjusted with the manual handle under the stage (front, back, left and right)
・Vibration isolation function: Table type air spring type vibration isolation table
・Power source: AC100V, 50/60Hz

○Analysis software VS-Viewer
・Analysis functions: WAVE2 (2-dimensional waviness analysis),
band decomposition, bearing, differentiation,
angle/normal,
FFT2 (frequency analysis using two-dimensional Fourier transform),
particle analysis (protrusion/hole analysis),
Average (image averaging),
ISO parameters (ISO/DIS25178-2(2007),-3.2(2010)
Profile (interference profile display),
Image (CCD intensity data), etc.

Device status
・Instruction manual included