Hitachi S-4500 II Scanning Electron Microscope

- Type II
- EDX

1) Performance
Resolution:
- 1.5 nm guaranteed (at accelerating voltage 15 kV, working distance 4mm)
- 4.0 nm guaranteed (at accelerating voltage 1 kV, working distance 3mm)
Magnification:
- High magnification mode: 50x to 500,000x
- Low magnification mode: 20x to 1,500x
- (maximum imaging field: 3.5mm dia.)

2) Electron Optics
- Electron gun: Cold-cathode field emission electron gun
- Emission extracting voltage (Vext): 0 to 6.5 kV
- Accelerating voltage (Vacc): 0.5 to 30 kV (variable in 100 V step)
- Lens system: 3-stage electromagnetic lens
- Objective aperture:
Movable aperture (4 openings selectable/alignable outside column
Self-cleaning type thin aperture
- Stigmator: Electromagnetic type
- Scanning coil: 2-stage electromagnetic type

3) Specimen stage
- Motion X: 0 to 100 mm (continuous)
- Motion Y: 0 to 50 mm (continuous)
- Motion Z (WD): 3 to 33 mm (continuous)
- Motion T (tilt): -5° to +60°
- Motion R (rotation): 360° (continuous)
- Maximum specimen size: 150 mm dia. (airlock specimen exchange)

4) Display Unit
- Principle: Flicker-free display with built-in image memory (at all scan speeds)
- Viewing CRT: 12" display monitor x 2 sets (including an image memory unit)
- Photo CRT: Ultra high resolution type (recording area: 120 x 90 mm) x 1 set
- Scanning mode: Normal scan, split screen/dual magnification, line scan,
position setting, spot, AAF (analysis area finder), SAA (selected area analysis),
oblique mode
- Scanning speed: 0.3, 2, 10/9, 20/25 s/frame for viewing mode (50/60 Hz) TV,
40/35, 80/100, 160, 320 s/frame for photo recording mode (50/60 Hz)
TV Signal: NTSC or PAL
- Signal processing/operation mode: Automatic brightness & contrast control,
gamma control, dynamic stigmator monitor, auto focus, automatic stigmator.
- Recordable/printable data: Film no., accelerating voltage, magnification,
micron scale, micron value, date/time and working distance printable on picture
- Data entry: Arbitrary alphanumeric characters and symbols overlayable at
any image position through keyboard
- Electrical image shift: ± 20 μm at WD 20 mm

5) Vacuum system:
- Vacuum sequence: Full-auto pneumatic valve system
- Ultimate vacuum: 7 x 10^-4 Pa (specimen chamber) & 1 x 10^-7 Pa
(electron gun chamber)
- Vacuum pumps:
- Electron optics: 3 ion pumps
- Specimen chamber: 1 diffusion pump & 2 rotary pumps
- Compressor: 1 unit