Gasonics

Ref : 1831171-9-GO

Condition : Used

Manufacturer : Gasonics

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 07 Jun. 2018

Gasonics Aura 2000

*8¿ Cassette to Cassette Single Wafer Etcher
*Configured for 8¿ wafers
*Downstream microwave process
*Loadlock with cool-down station for processed wafer
*Water cooled chamber and lamp assembly
*Downstream endpoint detection

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