Gasonics PEP3510A/A(L)

Ref : 2687905-9-FM

Condition : Used

Manufacturer : Gasonics

Model : PEP3510A/A(L)

Year(s) : 2000

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier GASONICS INTERNATIONAL
Model PEP3510A/A(L)
Vintage 2000
Software Version 4.0
CIM GEM
Process PHOTORESIST STRIPPING PROCESS

Hardware Confguration (Fab)
Main System MAIN TOOL 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
AC RACK 1 OK

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