Gasonics PEP3510A/A(L)
Ref :
254156
Condition :
Used
Manufacturer :
Gasonics
Model :
PEP3510A/A(L)
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section Etch
General Product Information
Vendor Supplier GASONICS INTERNATIONAL
Model PEP3510A/A(L)
Vintage 2000
Software Version 4.0
CIM GEM
Process PHOTORESIST STRIPPING PROCESS
Hardware Confguration (Fab)
Main System MAIN TOOL 1 OK
Hardware Confguration (Subfab / Auxilliary Units)
AC RACK 1 OK
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