Fusion

Fusion 150PC UV Stabilizer (Fusion 150PC)

Photostabilization System 150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substrates Cassette to cassette handling Fusion 150 PC Photostabilization System150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substratesSoftware Rev. 4.4Cassette to cassette handling Process combines an intense UV light exposure with a programmable increase of the semiconductor photoresist/substrate temperature Transporters: Robotic pick and place Lamp Functions: Off, Flash, Low, High Chuck Temperature Range: 50-240¡ãC, user selectable Chuck Temperature Ramp Rate: 0.5-2.5¡ãC/sec. range, user defined with max. rate dependent on substrate