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Fusion 200AC/ACU
Ref :
2687907-9-FM
Condition :
Used
Manufacturer :
Fusion
Model :
200AC/ACU
Year(s) :
1993
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Clean
General Product Information
Vendor Supplier Fusion Semiconductor
Model 200AC/ACU
Vintage 1993
Software Version Custom Software For Tool
CIM GEM
Process Dry Strip
Hardware Confguration (Fab)
Main System 200ACU Asher OK
Handler System 3 Way axis Robot OK
Factory Interface Open Cassette OK
Others Ozone Generator 1 OK
Hardware Confguration (Subfab / Auxilliary Units)
Chiller 1 OK