AMAT P-5000 Mark II MxP Poly

Ref : 2713254-9-CP

Condition : Used

Manufacturer : AMAT

Model : P-5000 Mark II MxP Poly

Year(s) : -

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Polysilicon Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 200mm
Current Equipment Status: Available
Available date: Currently Available
Software: 4.8_26
MF: P5000 Mark II
Qty 4 - MxP Poly
ESC: Polymide
Gases Used: SF6, HE, CHF3, AR, N2, CF4, O2, HBR, CL2, HE/O2
MFCs: 26 DIgital MFC's Unit or Horiba
Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:
1-BA100, 2 DS80/250,
2-IQDP80/WSU151

Chillers:
3-Neslab 150, 1-AMAT-0

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