AMAT Centura

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier AME
Model Centura Etch, IPS
Vintage 1997
Asset Description AMAT Centura IPS Etch Tool
Software Version E4.8_26
CIM SECS
Process ZX Etch

Hardware Confguration (Fab)
Main System IPS Chambers - A/B 2
Main System Centura Etch Mainframe, 2 IPS Chambers (A/B),
VME Controller, Seriplex Gas Panel 1 OK
Main System Seriplex Gas Panel 1 OK
Handler System HP Robot 1 OK
Handler System Wide Body Loadlocks/Cassettes 2 OK
Options System Endpoint 1 OK
Main System VME Controller/PDU 1
Handler System Wafer Orienters 2
Factory Interface Open Cassette 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
Generator Racks 2 OK

Missing/Faulty Parts / Accesorries List
Chamber B Unknown 1
Generator rack missing multiple parts 1
Heat Exchanger/ Chiller 1