AMAT Centura

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier Applied Materials
Model Centura Etch, IPS
Asset Description AMAT Centura IPS Etch Tool
Software Version E4.8_26
CIM SECS
Process MC/CA

Hardware Confguration (Fab)
Main System Centura Etch (IPS) Mainframe (without chambers) 1
Handler System HP Robot 1 OK
Factory Interface Open Cassette 2 OK
Main System VME Controller/PDU 1 OK
Main System Seriplex Gas Panel 1 OK
Options System OK
Handler System Tilt-out Cassettes 2 OK
Handler System Wafer Orienters 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
Generator Racks 2 OK
Heat Exchanger/ Chiller 1 OK

Missing/Faulty Parts / Accesorries List
IPS Chambers - REMOVED 2
Hard Drive 1