DNS SU3100

Ref : 254252

Condition : Used

Manufacturer : DNS

Model : SU3100

Year(s) : 2008

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Clean

General Product Information
Vendor Supplier DAINIPPON SCREEN MFG. CO., LTD.
Model SCREEN SU3100 [BEOL SW-CLEAN]
Vintage 2008
Asset Description SNK1600 DNS SU3100 Single Wafer Clean
Software Version V2.734ST001
CIM GEM
Process DNS-SU3100-8ch_BEOL_SWC (DHF 800:1 Process)

Hardware Configuration (Fab)
Main System 1
Handler System Index Robot
Handler System Shuttle Robot 1
Factory Interface FOUP 4 OK
Handler System Center Robot 1

Hardware Configuration (Subfab / Auxilliary Units)
E-Flow 1 Cabinet 1 OK
E-Flow 2 Cabinet 1 OK
Chemical Cabinet dHF 2 OK

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