DNS SU3100

Ref : 2697857-9-FM

Condition : Used

Manufacturer : DNS

Model : SU3100

Year(s) : 2011

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section Clean

General Product Information
Vendor Supplier SCREEN
Model SU3100
Vintage 2011
Software Version 258000
CIM E84, SECS/GEM, GEM300, Interface A
Process 530L00402A
Hardware Confguration (Fab)

System Type Description Quantity Status
Main System SU3100 8 CHM DHF, TMAH/TEAH, NH4OH OK
Factory Interface FOUP 4 OK
Options System E-Flow Unit OK
Handler System Standard Automation and Software OK

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