DNS SU3100

Ref : 254067

Condition : Used

Manufacturer : DNS

Model : SU3100

Year(s) : 2011

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Clean

General Product Information
Vendor Supplier SCREEN
Model SU3100
Vintage 2011
Software Version 258000
CIM E84, SECS/GEM, GEM300, Interface A
Process 530L00402A
Hardware Confguration (Fab)

System Type Description Quantity Status
Main System SU3100 8 CHM DHF, TMAH/TEAH, NH4OH OK
Factory Interface FOUP 4 OK
Options System E-Flow Unit OK
Handler System Standard Automation and Software OK

Other machines similar to DNS SU3100

1 DNS SU3100

Location : United States (USA)

Year(s) : 2012

1 DNS SS-3100

Location : United States (USA)

Year(s) : 2012

1 DNS SU3100

Location : United States (USA)

Year(s) : 2008

1 KLA UV1280 SE

Location : EUROPE (Western and Northern)

Year(s) : 1999