DNS SU3100

Wafer Size 300 mm
Fab Section Clean

General Product Information
Software Version 258000
CIM E84, SECS/GEM, GEM300, Interface A
Process Hot Ultra-DHF Confguration

Hardware Confguration (Fab)
Main System SU-3100 8 Chambers 1 OK
Options System E-Flow Unit 1 OK
Options System Reversing Unit 1 OK
Options System Nanospray 2 for 8 Chambers 1 OK
Options System DIW/CO2 Water Switchable Function 1 OK
Handler System Standard Automation / Software 1 OK
Factory Interface FOUP 4 OK

Missing/Faulty Parts / Accesorries List
HDIW valve & over pressure burst ftting 1
Contactor "relay" below circuit breaker 1
Circuit breaker 1
Electrical wire connection relay to circuit breaker 1