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ASM Advance 400
Ref :
2714171-9-CP
Condition :
Used
Manufacturer :
ASM
Model :
Advance 400
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 150 mm
Number of Cassette Platforms 24
Robot Manufacturer/Model Genmark
Controller Manufacturer/Model Genmark
Interface RS 232
Process Gases O2; N2;
Other Information
Genmark Roboter defect;
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