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ASM Advance 400
Ref :
2704570-9-CP
Condition :
Used
Manufacturer :
ASM
Model :
Advance 400
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 200 mm
Number of Cassette Platforms 24
Robot Manufacturer/Model Genmark
Controller Manufacturer/Model Genmark
Interface RS 232
Process Gases SiH4; Ph3; O2; H2; N2;HCl
Other Information
All components existing
Reactor serial ID 240320; 240350
CE Marked YES
Condition Very Good
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