ASM Eagle XP5 PEALD, like new

Tool Status: Deinstalled and crated and in storage. (March 2023)
like new!

Wafer Size 300 mm
Process PE-ALD System
Software Version Eagle I ASMJ software (Windows embedded XP / OS)
Process PE-ALD Oxide, HT-SiO/HT-SiN
Hardware Configuration (fab):
Main System ASM PE-ALD System Mainframe 1
Handler System FI: Kawasaki / Vac: JEL 1
Factory Interface FOUP 2
Options System
Others Process Chamber (RC3 / RC4) 2

Hardware Configuration (subfab/ auxiliary units):
Power Rack 1

Notes
The ASM Eagle is like new.
It was never used in Production and only used to test wafers.
One chamber had a throttle valve issue and RF Gen issue.
The RF Gen was replaced but they did not
replace the throttle valve so only one chamber was
used to test the wafers.
The liquid gas panel was not used.
There are 2 spare MFCs included.

Are you in need of a high-precision,
reliable tool for creating thin film coatings on your semiconductor substrates?
Look no further than the 2010 ASM Eagle XP5 PEALD system!

This advanced machine utilizes plasma-enhanced
atomic layer deposition (PEALD) technology to
create ultra-thin, uniform coatings on
a variety of substrate materials.
It is capable of producing coatings with
exceptional uniformity and reproducibility,
making it ideal for a wide range of
applications in the semiconductor industry.

The ASM Eagle XP5 is a versatile tool that
can be used to deposit a wide range of materials,
including metals, oxides, and other compounds.
It is also capable of operating at a range of
process pressures and temperatures,
making it suitable for use in a variety of
manufacturing environments.

In addition to its impressive coating capabilities,
the ASM Eagle XP5 is also built with durability and
ease of maintenance in mind.
It has a robust design and is backed by
ASM's reputation for producing high-quality,
reliable equipment.

Don't miss out on this opportunity to add a powerful,
flexible thin film coating system to your manufacturing arsenal.
Purchase the 2010 ASM Eagle XP5 PEALD today and
take your semiconductor production to the next level!