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AMAT P5000 Etch
Ref :
2655736-9-CP
Condition :
Used
Manufacturer :
AMAT
Model :
P5000 Etch
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Applied Materials Precision 5000 (AMAT P5000) cluster tool and all spare parts.
4-inch/100mm wafer kit, pump stand, power distribution, chillers, pumps, power supplies
Chamber A: Metal etch, not usable (needs new chamber)
Chamber B: Dielectric etch, fully functional
Chamber C: Polysilicon etch, not functioning, gas flow issues,
new helium seals required
Chamber D: Not used, status unknown.
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