AMAT Frontier - Etch for Junctions

Wafer Size 300 mm
Fab Section Thin Film

General Product Information
Vendor Supplier AMAT
Model FRONTIER - Etch for Junctions
Vintage 2015
Software Version B5594_B8.10_31
Process CHA-SiCoNi, CHB-Frontier, CHCFrontier

Hardware Confguration (Fab)
SiCoNi PME 1
Producer GT System - R&D Confguration 1
Frontier SMR Nitride 1
Factory Interface FOUP 3
4 HX and 2 chillers 1
SiConi GP-A 1
Frontier Gas Panels Positions B and C 1