AMAT Frontier - Etch for Junctions
Ref :
2676041-9-FM
Condition :
Used
Manufacturer :
AMAT
Model :
Frontier - Etch for Junctions
Year(s) :
2015
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 300 mm
Fab Section Thin Film
General Product Information
Vendor Supplier AMAT
Model FRONTIER - Etch for Junctions
Vintage 2015
Software Version B5594_B8.10_31
Process CHA-SiCoNi, CHB-Frontier, CHCFrontier
Hardware Confguration (Fab)
SiCoNi PME 1
Producer GT System - R&D Confguration 1
Frontier SMR Nitride 1
Factory Interface FOUP 3
4 HX and 2 chillers 1
SiConi GP-A 1
Frontier Gas Panels Positions B and C 1
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