AMAT Centura

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier Applied Materials
Model 200mm Centura II IPS, Etch
Vintage 1999
Asset Description AMAT Centura II IPS Etch Tool
Software Version E4.8_26
CIM SECS
Process ZX Etch

Hardware Confguration (Fab)
Main System VME Controller/PDU 1 OK
Main System Analog Gas Panel 1 OK
Handler System Tilt-out Cassettes 2 OK
Factory Interface Open Cassette 2 OK
Main System IPS Chambers 3 OK
Main System Centura II Etch Mainframe, 3 IPS
Chambers (A/B/C), VME Controller,
Analog Gas Panel 1 OK
Options System Endpoint 1 OK
Handler System Wafer Orienters 2 OK
Handler System HP Robot 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
Heat Exchangers/ Chillers 2 OK
Generator Racks 3 OK