3 KLA-Tencor 8100XP
Ref :
2188814-9-GO
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
8100XP
Year(s) :
2000
Quantity :
3
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2024
Configuration:
KLA-Tencor 8100XP CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.
Performance Specification:
• Feature Size: < 30 nm
• Resolution: < 4 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage: 0.4kV - 1.5kV
• Throughput: upto 50 wafers/hr
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