3 KLA-Tencor 8100XP

Configuration:

KLA-Tencor 8100XP CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.

Performance Specification:
• Feature Size: < 30 nm
• Resolution: < 4 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage: 0.4kV - 1.5kV
• Throughput: upto 50 wafers/hr