Yield Engineering Systems (YES) 310

Description HMDS Vapor Prime & Image Reversal
Maximum Temperature 275 ºC (527 ºF, 548 ºK)
Temperature Control
Control Stability ± 2.000 ºC
Heat/Cool Controls
Control Type Digital Setpoint
Overtemperature Protection YES
Controller Manufacturer/Model Athena
Chamber Size
Width 12.00 in (30.48 cm)
Depth 13.25 in (33.66 cm)
Height 12.00 in (30.48 cm)
Chamber Characteristics
Chamber Construction Stainless Steel
Number of Shelves Provided 1
External Cooling Air Cooled