Yield Engineering Systems (YES) CV100PZ

Microwave Downstream Asher--2.4 GHz
Accessories

Granville Phillips 275 Convectron Gauge Controller
Quick Panel Jr. Controller
Athena Temperature Controller
Other Information

Applications:
•Photoresist removal
•Polyimide removal
•Organics removal
•Descum processes
Power Requirements 120 V 20.0 A 60 Hz 1 Phase
Exterior Dimensions
Width 33.000 in (83.8 cm)
Depth 37.000 in (94.0 cm)
Height 30.000 in (76.2 cm)
Weight 342 lb (155 kg)