Yield Engineering Systems (YES) 450PB6-8

450C polyimide bake oven
each compartment holds 2 cassettes of 150mm wafers
100 micron inlet for preheated laminar nitrogen purge
will accomodate up to 8 cassettes of 4/5/ or 6" wafers
front panel PLC controller with Granville Philips analog vacuum gauge
heat up /cool down 3-4C/min
4 compartments each 8"w x 7.8"h x 14.5"deep
overall dims 24.5"w x 31"h x 33"d
shipping weight 780lbs
power req. 208v/3 phase, 4 wire, 30 amps