Tencor P-16+ stylus surface profiler

Wafer Size 8"
Vintage 2012-3
Tool's Condition Refurbishing

The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that
measures step height, roughness, and waviness on sample surfaces.

•; Up to 8" wafer size
•; Microhead 5
•; Dual view optic (Top & side)
•; Lens : 6.4X , Magnification Range : 300X~1012X
•; Repeatability : 6 Å;; or 0.1% (1 s),
*. To be refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.