TEL U2E-855DD

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier TOKYO ELECTRON LTD
Model U2E-855DD
Vintage 1997
Asset Description UNITY 2E OXIDE ETCHER
Software Version VER 3.61
CIM GEM
Process OXIDE

Hardware Confguration (Fab)
Main System TOOL ETCHER 1 OK
Handler System YASKAWA ROBOT 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
Description Quantity Status
AC AND RF RACK 1 OK

Missing/Faulty Parts / Accesorries List
CHILLER NOT FOR SALE 1
LPT NOT FOR SALE 2
PUMPS NOT FOR SALE 4