TEL, Tokyo Electron Tactras Vigus MK

Oxide Etcher, fitted with 4 process chambers
Version: 300 mm
Vintage: 01.06.2012
-Tool Vintage: Jan 2012
-Tool layout: TAC-3WWZZWW
-Mainframe vintage: June 2010
-De-installed date: Aug 2021
-OEM Moving kit was installed
-Loader Module Vintage: Dec 2011
-Chamber Vintage Dec 2011
-Deinstalled and warehoused
-Can be inspected by appointment
-Tool type: Vigus RK

Packing list:-
Item #1 EFEM with 3 x Asyst Loadports
Item #2 Transfer Module
Item #3 Process Module 1
Item #4 Process Module 2
Item #5 Process Module 5
Item #6 Process Module 6
Item #7 AC Rack 1
Item #8 AC rack 2
Item #9 Parts Box

-Gate Valve Type: VAT
-Turbo pump controllers type: Shimadzu EI-R04M
-RFG: FRM-30A
-Included Kyosan Electric p/n 2l39-000021-12
Power line 1 Input: 208 VAC 50/60 HZ 3 PHASE 3 WIRE + GND
Max breaker rating: 350A SCCR 5 kA Full load amps: 188A
Power line 2 Input: 208 VAC 50/60 HZ 3 PHASE 3 WIRE + GND
Max breaker rating: 120A SCCR 5 kA Full load amps: 86A
Power line 3 Input: 208 VAC 50/60 HZ 3 PHASE 3 WIRE + GND
Max breaker rating: 60A SCCR 5 kA Full load amps: 15A