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TEL Alpha-8S-Z
Ref :
2698218-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
Alpha-8S-Z
Year(s) :
2004
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Diffusion
General Product Information
Vendor Supplier TOKYO ELECTRON LIMITED
Model ALPHA-8S-Z
Vintage 2004
Asset Description VERTICAL FURNACE (FLAT POLY)
Software Version TS-4000
CIM SEC / GEM
Process LPCVD- POLY
Hardware Confguration (Fab)
Main System Main tool 1
Handler System Built in units
Factory Interface SMIF 2
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