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TEL Alpha-8S-Z

Ref : 254126
Condition : Used
Manufacturer : TEL
Model : Alpha-8S-Z
Year(s) : 2004
Quantity : 1
Location : Seller or machines location:
United States (USA)
Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Diffusion

General Product Information
Vendor Supplier TOKYO ELECTRON LIMITED
Model ALPHA-8S-Z
Vintage 2004
Asset Description VERTICAL FURNACE (FLAT POLY)
Software Version TS-4000
CIM SEC / GEM
Process LPCVD- POLY

Hardware Confguration (Fab)
Main System Main tool 1
Handler System Built in units
Factory Interface SMIF 2

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