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TEL Alpha-8S-Z
Ref :
2687230-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
Alpha-8S-Z
Year(s) :
1993
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Diffusion
General Product Information
Vendor Supplier TOKYO ELECTRON LIMITED
Model ALPHA-8S-Z
Vintage 1993
Asset Description WDRIVE Furnace
Software Version VB7.0 R0027
CIM SECS
Process HTSIC WDRIV
Hardware Confguration (Fab)
Handler System Carrier/Wafer transfer unite 1
Factory Interface SMIF 1 OK
Main System Main frame Carrier stage) 1 OK
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