TEL Alpha-808S

Wafer Size 200 mm
Fab Section Diffusion

General Product Information
Vendor Supplier Tokyo Electron Limited
Model ALPHA-808S
Vintage 1996.1
Asset Description GATOX-03
Software Version V07.03 R0001
CIM SECS
Process Gate Oxidation
Hardware Confguration (Fab)
System Type Description Quantity Status
Handler System Wafer Transfer System Robot 1 OK
Factory Interface SMIF 1 OK
Main System Main System 1 OK

Missing/Faulty Parts / Accesorries List
Note: Quartzware is NOT included.

Tool Pictures
General GATOX-03