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TEL Alpha-808S
Ref :
2698835-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
Alpha-808S
Year(s) :
1996
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Diffusion
General Product Information
Vendor Supplier Tokyo Electron Limited
Model ALPHA-808S
Vintage 1996.7
Asset Description GATOX-05
Software Version V07.03 R0001
CIM SECS
Process Gate Oxidation
Hardware Confguration (Fab)
Main System Main System 1 OK
Handler System Wafer Transfer Robot System 1 OK
Factory Interface SMIF 1 OK
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