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Tegal

Ref : 1845309-9-GO
Condition : Used
Manufacturer : Tegal
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 12 Jul. 2018

Tegal 901E Rie

*Cassette to Cassette Poly/Nitride Plasma Etcher
*13.56 MHz RF Generator
*Easy to use menu driven control
*Input gases controlled by MFC, up to 4 MFC with system
*Non-friction spatula wafer transport

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