Tegal

Ref : 1845263-9-GO

Condition : Used

Manufacturer : Tegal

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 12 Jul. 2018

Tegal 515 Plasma Etchers (Tegal 515 Plasma stripper)

*Barrel Type Plasma Asher Batch loaded
*Barrel type plasma reactor designed specifically for use as a fast stripper of photoresist for the fabrication of semiconductor wafers
*Achieves its strip rates by providing a large rate of gas conduction up to 300W of RF Energy
*Reaction Chamber: Aluminum 12¿ (30.48 cm) deep
*Manual or automatic modes

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