Tegal Tegal 903e etcher system
Ref :
280464-9-W
Condition :
Used
Manufacturer :
Tegal
Model :
Tegal 903e etcher system
Year(s) :
1995
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check :
21 Jul. 2011
- Plasma etch chamber
- cassette to cassette, single wafer, silicon dioxide etch system with diode chamber
- 2x temperature controllers
- 6" wafer capability
- Power supply 1000W 13.56Mhz
- SEMI SECS I+II
- RS232C serial port
- 4MFCs (N2, CHF3, SF6, He calibrated)
- including backing pumps and transformer
Other machines similar to Tegal Tegal 903e etcher system
10
6 Allwin21 AW-901eR TTW, AW-903eR TTW - [email protected]
Location :
AMERICA North (USA-Canada-Mexico)
11
6 Allwin21 AW-901eR TTW, AW-903eR TTW - [email protected]
Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
2024
1
Tegal 903e
Location :
AMERICA North (USA-Canada-Mexico)