Tegal 903E

Ref : 2419161-9-CP

Condition : Used

Manufacturer : Tegal

Model : 903E

Year(s) : 1985

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 12 Dec. 2023

-Set up for load and unload of 4 inch wafers, cassette to cassette.
-Sold Strictly "as is, where is", with condition as shown in the photos.
-Parts included:-
-RF Delivery Item CR1044-00406RW s/n 10511
-Matching Network Item CR1113-00301 s/n 14321
-Item CS1017-400xx s/n 10135 S22233232222W
Gas Box Setup:-
Gas N2 Range 2 SLM UPC1300
Gas: CF4 Range 100 sccm UFC1200A
Gas: N2 Range 20 SCCM UFC1000
Gas: C2F6 Range 50 sccm UFC1000

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