Tegal 901e, Nitride/poly Etcher

Used

Manufacture : Tegal
Model : 901e
Equipment Description : Nitride/poly Etcher

Details:
Wafer Size : 6"

Operational Manuals, electronics Schematics
& Spare Parts Drawing included

Sub Systems :

1. RF Generator (ACG 10)
2. Monitor / Keyboard (VT420)
3. Temp. Controller (1 ea)

Spec :

-Main system ; 44"w x 42"D x 26"H
500 lbs
208 VAC, 30 AMmp, 1 phase

-RF Generator; 20"w x 16"D x 10"H
104 lbs
208 VAC

-CRT & Keyboard

-Temp. Controller ; 24"W x 20"D x 30"H
300 lbs
208 VAC, 1 phase

-Gas ; Gas1,2,3,4 & Clean O2