Technics Micro Stripper -- Series 200

Maximum 100 mm
Process Plasma etch
Controller Type Microprocessor Controller Type
End Point Detection Yes
Roughing Pump 10-15 CFM, not included
Automatch Text Manual or Automatic mode
Number of Gas Inputs Two Gas

Accessories
DSPC-71 Downstream pressure controller
Stainless steel wafer boat, 25 wafers capacity
Stainless steel tray for small parts

Other Information
Chamber is air cooled
RF Generator: 200 W 13.56 MHz
Mechanical pump sold separately. Visit Rotary Vacuum Pumps category to select one.

Power Requirements 110/120 V 15.0 A 60 Hz 1 Phase
Operating Air Pressure 60.00 PSI (413,718.00 N/sq m)

Exterior Dimensions
Width 20.000 in (50.8 cm)
Depth 20.000 in (50.8 cm)
Height 16.000 in (40.6 cm)