Solid State Measurements (SSM) 5200

SSM 5200 Automatic CV System for CV/QV/IV measurement

Fully automated capacitance-voltage(CV),charge-voltage(QV), and 쟠urrent-voltage(IV) 쟳ystem
[Direct Measurement]
- Accurately measure CV, QV and IV characteristics쟯f MOS test structures in scribe lines on product wafers.
[Pattern Recognition]
- Vision system for fast pattern recognition for automatic placement of measurement probe.
[Cassette-To-Cassette Loading/Unloading]
- Robotic loading and unloading of wafers with flat or notch alignment.
Fast - Effective oxide charge and carrier density measurements in 50seconds, ion implant dose in 20 seconds.