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KLA, MicroSense UMA-C200-STR Thin Film Stress Measurement System
Ref :
2686191-9-CP
Condition :
Used
Manufacturer :
KLA, MicroSense
Model :
UMA-C200-STR Thin Film Stress Measurement System
Year(s) :
2019
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
200mm
As-is
KLA / MicroSense UMA-C200-STR Thin Film Stress Measurement
System consisting of:
- Vintage: Approximately 2019
- Provides:
- Wafer Thickness
- Average wafer bow and warp, average wafer radius of
curvature
- Average wafer film stress
- 2D Local Stress Map with Min and Max values
- 3D Local Stress Map with Min and Max values
- Local Line Stress Profiles with specified orientation,
including Min and Max values.
- Exportable data and maps
- Used Minimally for R&D & Light Production
Condition: Operational, installed in fab.
Being Sold in As-Is / Where-Is Condition.
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