Solid State Measurements (SSM) 2000 Nano SRP

System Measurement Performance
Spreading Resistance Dynamic Range : 1Ω to > 10Ω
Reistivity : 10-⁴~ 4x10⁴Ωcm
Concentration : E11 cm-3 ~ E21 cm-3

Computer Subsystem
Operating System : Window XP
Image Capture : Matrox Pulsar Frame Grabber / Video Controller
Application S/W : NanoSRP'" software

Automated Features
• Probe conditioning
•Probe calibration
• Sample alignment
• Unattended operation
(NanoSRP™ Bevel Edge Alignment Tool )

Probing Subsystem with multiple sample fixture
- Probe Spacing : Minimum 65 µ;m (Standard)
- Probe Load : 10g (standard)
- Sample Mounts : Up to 6 samples
- Vision System : DIC / 5x, 10x, 20x, 50x objectives / Cohu 2100 series CCIR/RAL gray scale camera
- Stage Motion : 80 mm X/Y/Z-axis range (80mm/90mm/3mm)
- Vibration Damping Table

Accessories
- Mounted probes / Bevel Sample Mounts /Grinding jig /
Heat sink for sample mounting /Mounting wax /
0.05 or 0.1 um Diamond compound
- Measurement fixture: 6 position
- Conventional probe conditioning fixture :
QTA/P probe qualification samples / Probe Shaper Tool /
Probe Cleaner Tool / Gorey-Schneider probe grinder


Fully refurbished.
Can demonstrate any time.