Solid State Measurements (SSM) 150

Process: Spreading resistance probe
*. Measurement perfomance:
- Resistivity and Dopant concentration
- Resistance measurement & Carrier concentration profile analysis in all structures of silicon
Resistance: 1 1 to >E10
Resistivity: 10-⁴Ωcm~4x10⁴
Dopant Concentration: >10²¹cm-³ to < 10¹¹cm-³

*. Measurement configuration:
- Carrier concentration profile analysis & Depth measurement

*. Hardware configuration:
- Standard Microscope/Probe Assembly Test Unit
- Electronics Cabinet with Probe Unit, Pneumatics Control, etc
- Probe subsystem with Anti-Vibration table
- Optic Fiber Light Sources and Holder
- IBM Computer Package & LCD Color monitor
- 110V/50/60Hz

*. Software configuration:
- Operation System: MS DOS 3.3
- Operation Software: D150 Version 5.12

*. Accessory (Option):
- Lapping Machine, N/P Type unit and Probes,QTA/PEN, Gorey-Schnider grinder,Angle dies,others
(100)N.P (111)N,P calibration STD sets

*. Fully refurbished.
*. Installed in Clean-room.