Shibaura
Ref :
1740622-9-W
Condition :
Used
Manufacturer :
Shibaura
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
07 Feb. 2024
Shibaura-Shibatec
Model
CDE-80NH
Wafer Size
8 inch
Conation Id
142
Configuration
Polysilicon Etch tool - Serial Number: SFX0041
Wafer Size: 200 mm
Single cassette
Single chamber
Transfer chamber
DAIHEN SGM-10A1 Generator
5 Gas Boxes
Main Controller
TAITEC CH-402BF chiller
Operations and maintenance manuals
OEM equipment instruction manual
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