Semiprobe SA-8
AMERICA North (USA-Canada-Mexico)
1 x SEMIPROBE Model: SA-8
Wafer Size: 8"
Semiautomatic prober, 8".
Chuck stage X-Y movement:
Travel: 205 mm x 205 mm
Speed: 50 mm/sec (max)
Resolution: 0.1 µm
Repeatability: +/-0.5 µm
Accuracy: +/- 3 µm
Plananty: +/- 6 µm over travel range
Nema 17 stepper motor
Optical linear encoder
Chuck stage Z movement:
Z Travel: 12 mm
Resolution: 0.1 µm
Repeatability: +/-1.5 µm
Theta movement:
Travel: +/- 4°
Resolution: 0.29 arc-sees (0.003°)
Chucks:
Vacuum / Mechanical damping
Round / Square
HF, HV/HC
Ambient thermal / Custom
Handle die
Waffle packs
Sawn wafers on frame
Nickel plated steel with concentric vacuum rings
Plananty: 5 µm
Platen: Aluminum with stainless steel top
With removable front wedge
Manipulator placement: 360°
Manipulator fixation: Magnetic
Platen movement:
Platen lift: Fixed / Adjustable
Adjustable: Coarse, 40 mm
Microscope mounting / movement:
Mounting: Boom
Post / Bridge
Movement: Manual
Power: 110/220 V, 50/60 Hz, 20 A
Vacuum: 23 Hg / -0.8 Bar