Semiprobe Diced wafer Inspection system

Semiprobe wafer prober mounted on Newport table
Inspects diced wafers mounted on film frames
Wafer stage with motorized X,Y and theta
Motic PSM-1000 microscope with 5x and 20x objectives
video port with camera and monitor
Motic fiber optic light source
2 inkers for die marking
PC with Semiprobe software for wafer mapping and
defect marking
Chuck configured for 150mm wafer frames with alignment pins
Newport vibration isolation table with 4" breadboard