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Santa Clara Plastic SCP EVOLUTION 200 (E200)
Ref :
2629136-9-CP
Condition :
Used
Manufacturer :
Santa Clara
Model :
Plastic SCP EVOLUTION 200 (E200)
Year(s) :
2001
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer size: 8"
Condition: as is
- Load/Unload: Dual SMIF Arm with Wafer Transfer System (LRL process flow)
- Module Sulfuric
- Module Hot QDR + Megasonic
- Module SC1
- Module HF diluted
- Module QDR
- Module BHF
- Modules 7/8: End.Effector Wash and Dry + SCP Green Dryer
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