Rudolph SpectraLaser 200 film metrology system
EUROPE (Western and Northern)
Vanguard automation platform including:
- Clean room compatible stainless steel cabinetry
- Dual SMIF I/O for 6” POD’s
- High speed random access robot
- Single-spin virtual flat/notch finder
- Internal mini-environment with ULPA filter system and ultra-clean sample environment
- Pentium Pro PC with min. 1GB HDD, 1GB removable HDD, keyboard and pointing device
- 14” flat panel SVGA color display
- Integrated data processing and display software for fast data analysis, quality tracking and report generation
- 2D / 3D mapping, etch subtraction, diameter and radius scan displays
SpectraLASER metrology system including:
- Focused Beam Ellipsometer film measurement system with microspot optics (5x10um)
- Laser light source incl. 633HeNe and solid state 780and 905nm lasers
- Microscope with color corrected optics, autocollimator and high resolution CCD camera (7.2mm x 5.4mm and 720um x 540um fields of view)
- Cognex CoNLPAS pattern recognition