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Rudolph S3000-S

Ref : 2675280-9-FM
Condition : Used
Manufacturer : Rudolph
Model : S3000-S
Year(s) : 2011
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section Thin Film
Asset Description THK2550-T - THK2550FP RUDOLPH
S3000S (MT)
Software Version 7.30.10.3 MB-212 AB-130
CIM E84, SECS/GEM, GEM300
Process Film Measurement

Hardware Confguration (Fab)
Main System S-Series Vanguard II 1
Factory Interface FOUP 1
Others SiOX Reference Chip Assembly (NewNot Installed) 1

Missing/Faulty Parts / Accesorries List
SiOX Reference Chip Assembly 1
Exhaust components 4
LAIP Shelf not installed 1

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