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Rudolph S3000-S
Ref : 253031
Condition : Used
Manufacturer : Rudolph
Model : S3000-S
Year(s) : 2011
Quantity : 1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check : 26 Feb. 2025
Wafer Size 300 mm
Fab Section Thin Film
Asset Description THK2550-T - THK2550FP RUDOLPH
S3000S (MT)
Software Version 7.30.10.3 MB-212 AB-130
CIM E84, SECS/GEM, GEM300
Process Film Measurement
Hardware Confguration (Fab)
Main System S-Series Vanguard II 1
Factory Interface FOUP 1
Others SiOX Reference Chip Assembly (NewNot Installed) 1
Missing/Faulty Parts / Accesorries List
SiOX Reference Chip Assembly 1
Exhaust components 4
LAIP Shelf not installed 1
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