Rudolph EL III, Ellipsometer

Used

Manufacture : Rudolph
Model : EL III
Date Manufactured : 09/89
Ellipsometer

Details:
Wafer Size : 200 mm
Wafer Size : up to 4"

Sub Systems : 1. Small Spot Optics
2. Other Optics ( A 7899 & A 7917 )


Thickness and refractive index measurements
of double layer transparent films
Operating Principles : Null Seeking
Operating Wavelength : 632.8nm
Resolution & Accuracy : Polarizer or Analyzer _ 0.05¨¬
DELTA _ 0.1¨¬
PSI _ 0.05¨¬
Angle of Incidence : Standard pin locations
70¨¬¡¾0.02¨¬ and 90¨¬¡¾0.02¨¬
Optional Pin Locations 60¨¬ & 80¨¬
Measuring Time : Typlical
Single Film : 15 seconds
Double Film : 20 seconds
Digital Output : Serial ASCII,RS-232 / RUDOLPH and SEMI
Communication Standards.
Mounting Plane : 6¡± X 6¡± (15.2cm X 15.2cm)
Horizontal with vacuum holddown.
Autocollimator / Microscope : Microscope magnification 9X
Field of view 15mm.
Thermal Printer : Built in
Dot-Matrix format. Alpha-numeric