Plasmatherm Versaline DSE-III

Last knows condition: operational, GUI PC and CTC PC in
e-rack are not working.
Application: deep silicon etch
Substrate size: 4”,6”,8”. Mechanical clamp -40C..+40C with
Affinity chiller
Semi-auto load lock, single wafer
Plasma-Therm ICP-II DSE 3-turn source
3.5kW, 2MHz ICP RF package (5kW limited to 3.5kW)
High-Speed Process Modulation w/
1-100kHz DBS RF package for DSE
Heated chamber 180C
Optical End Point Detection
Gas box with 4 lines (C4F8, SF6, Ar, O2. 400/600/50/50sccm)
Fast gas switching option for DSE
User terminal mobile cart
Edwards ih80 dry pump
Edwards xds35i load lock dry pump
Edwards 1300l/s STPA turbo
380VAC 3 phase (with transformer)
Low Maintenance Package
Through-wall panel is not included